Advantages：
1.Adjustable four-rail design, compatible with 40-84mm strips.
2.Our unique stainless steel cathode rail and anti-jamming design ensure a stable and secure operating environment.
3.Our software control system promotes smooth operation and higher efficiency.
4.The equipment ensures uniform plasma concentration, leading to excellent cleaning outcomes.
5.The equipment has a wide range of process parameter adjustments, offering flexible production capabilities.
95 mm ceramic three-track electrode
63.4 mm ceramic four-track electrode
track BGA electrode (33.6 mm)
Three-track BGA electrode (76.3 mm)
Longer process times result in lower WCA.
WCA Comparison for Three-track Electrode
Four-track L/F electrode (70 mm)
Four-track BGA elecyrode(36.4mm)
Three-track L/F electrode (76.3mm)
Our equipment offers flexible electrode replacement to meet the demands of different products while ensuring uniform water contact angles in different areas.
| Parameter | Details |
| Dimensions | 1920*1320*1820mm(L*W*H) |
| RF Generator | 1000W，13.56MHz |
| Cathode | Stainless steel |
| Vacuum Pipe | Stainless steel |
| Process Gas | Ar、O2 Optional |
| Control System | PC |
Pre-wire bonding plasma clean Through pre-wire bonding plasma clean, the adhesion between Compound and Substrate can be significantly enhanced.
Without plasma cleaning: poor bonding, easily falls off
With plasma cleaning: good bonding
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